F Turbo molecular vacuum pump

Model

F100/180

F100/300

F400/3600

Inlet flange

—

LF100

CF100

LF100

CF100

LF400

CF400

Outlet flange

—

KF25( DN25 ISO-KF)

KF25( DN25 ISO-KF)

KF40( DN40 ISO-KF)

Pumping speed

L/s

180

300

3600

Limit pressure

Pa

5×10-7

6×10-6

5×10-7

6×10-6

5*10-7

6*10-6

Inlet start pressure

Pa

800

-

Inlet withstanding impact pressure

Pa

600

-

Compression rate N2/H2

—

1×108/5×102

1×108/6×102

Motor rotary speed

rpm

24000-36000

13200

Motor Power

W

5×10-7

6×10-6

5×10-7

＜280

Startup time

min

＜6

＜20

Bearing

—

Ceramic Bearing

Backing pump

L/s

3

3-6

18 Mechanical pump

+70 Roots pump

Cooling water temperature

℃

≤25

Cooling water consumption

L/min

＞1

Baking temperature of the pump body

℃

≤100

Using temperature

℃

Water Cooling ＜40;

Air cooling ＜32

Water Cooling ＜40

Installation direction

—

Vertical or horizontal

Vertical

Weight

kg

～16

~19

~102