CVD RF vacuum coating equipment
1546
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China Bienes de equipo

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Bienes de equipo

CVD RF vacuum coating equipment

This equipment adopts RF frequency technology to make mixed gas and substrate interaction in a certain temperature and vacuum conditions. It formed metal and compound membrane in the substrate surface.

Operational principle:
This equipment adopts RF frequency technology to make mixed gas and substrate interaction in a certain temperature and vacuum conditions. It formed metal and compound membrane in the substrate surface, the substrate surface have wear resistance, oxidation resistance, corrosion resistance, specific electrical, optical and friction performance and other special requirements. The equipment is applied in glass, ceramics, semiconductors, metals industry etc. It can form all kinds of metal film, alloy plating film, reaction of compound film, dielectric film and so on.
Main feature:
1. traditional vertical or high-efficient horizontal , using high-performance RF power supply
2. Equipped with many of magnetic control target, various of target material .
3. The substrate temperature about 600 ℃, plasma assisted.
4. The system adopts oil-free vacuum system, to ensure the whole system work under the oil-free condition to make the film clean;
5. The vacuum system interlock protection, vacuum pump have alarm function when water shortage, power outage;
6. Touch screen and PLC automatic control, realize parametric settings to the main components , real-time monitoring and intelligent fault diagnosis.
Basic outfit:
1. Chamber structure: vertical or horizontal structure ,all stainless steel material , the vacuum chamber effective diameter of 800mm-2000mm, water-cooled double sandwich structure, inside stainless steel plate with a plug-in anti-fouling, easy to clean and operation;
2. The work-piece frame: common monolithic or umbrella structure, or customized according to customer requirements, adopts inverter to adjust, and speed stepless adjustable;
3. Vacuum systems: mechanical pump, vane pump, roots pump, molecular pump, cryogenic pump, high vacuum oil diffusion pump with cold trap .the pre-pump for oil-free vacuum pumps with stainless steel and valves;
4. Vacuum assisted pump system, equipped with a rapid circulation of low temperature steam trap;
5. Pneumatic system: automatic gas meter and flow display control;
6. Control system: color touch screen, PLC, automatic and manual control convertible. Real-time display detailed parameters, automatic control the entire production process, automatic storage process parameters. The main electric elements adopt Schneider, Siemens and other famous brands;
7. Security system: water, electricity, gas abnormal sound and light alarm device, and perform the corresponding protection;
8. Heating and baking system: stainless steel tubular heating element, substrate temperature up to 350 degrees, the temperature control using the Japanese conductivity meter, temperature control accuracy of ± 1 ° C;
9. film thickness control: quartz crystal thickness monitoring system can control the electron gun evaporation rate, precise control of film thickness, manual and automatic easy switching.

model

CVD-600

CVD-800

CVD-1000

CVD-1200

CVD-1400

CVD-1600

Pumping speed

It will take less than 5 minutes from air to 5*10-1Pa

Ultimate vacuum

3*10-3Pa

Pressure rising rate

0.67Pa/h

gas

Precision meter control 1-6 road work gas

Radio frequency (rf) power

3---12KW

Pump

Rough pump or diffusion pump or molecular pump

heating

9KW

12KW

15KW

18KW

24KW

36KW

Work frame

The shape can be customized design

Control mode

Manual, semi-automatic and fully automatic control; Control panel use Chinese and English langu age

Ubicación : Room 502,NO.1299 New Jinqiao Road, Pudong New Area, Shanghai, China , 201206 ShangHai,
Persona a contactar : Keyvan Liu, 0086 21 50878199

Leadingcoating

  • 3.5/5
Detalle
Inscrito el 22 abril 2015

Identificación de la empresa : 09369948-9

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Leadingcoating

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CVD RF vacuum coating equipment

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