SF series electron beam( electronic gun) evaporation optics vacuum coating machine

Electron beam evaporation has high thermal efficiency, beam density, fast evaporation speed and higher purity comparing with average resistance heating evaporation

Operational principle:
Material in water-cooled copper crucible, directly using electron beam heating. Electron beam evaporation has high thermal efficiency, beam density, fast evaporation speed and higher purity comparing with average resistance heating evaporation .And the equipment has convenient clamping, film thickness control precision, easy to operation and full automatic control.

Application field:
mainly used for glass lens, acrylic, crystal ornaments, plastic panels, resin material. This equipment can coat diamond with colorful decoration film, reflective film, coating, uv protection film, reflective film, filter membrane, beam splitters, dielectric film and so on. Very large scale film and multi-layer film can be realized. The machine can meet the requirement of reflective glass, binoculars, glass lens, optical lens, light cup, the silver film, AF film products of phone screen.

Main feature:
1. The traditional vertical or efficient horizontal, equipped with large crucible gun, the film surface is smooth and uniformity.
7. 2. Equipped with high-power ion source, improve the coating quality and efficiency;
3.Equipped quartz crystal film thickness control device, can realize the film forming rate and automatic process control;
4. The design of structure can meet the demands of vacuum technology, vacuum system adopt free-oil system to ensure the whole system work under no oil condition, enssure film clean;
5. The vacuum interlock protection of operating system, vacuum pump with water, power outage alarm function;
6.Touch screen and PLC control, realize the parametric Settings, real-time monitoring and intelligent fault diagnosis.

Basic outfit:
1. Chamber structure: vertical or horizontal structure ,all stainless steel material , the vacuum chamber effective diameter of 800mm-2000mm, water-cooled double sandwich structure, inside stainless steel plate with a plug-in anti-fouling, easy to clean and operation;
2. The work-piece frame: common monolithic or umbrella structure, or customized according to customer requirements, adopts inverter to adjust, and speed stepless adjustable;
3. Vacuum systems: mechanical pump, vane pump, roots pump, molecular pump, cryogenic pump, high vacuum oil diffusion pump with cold trap .the pre-pump for oil-free vacuum pumps with stainless steel and valves;
4. Coating system: using 1 set or 2 sets of high power E type magnetic deflection 270 ° electron gun and multiple point crucible, assisted deposition system equipped with hall ion source and resistance evaporation source;
5. Pneumatic system: automatic gas meter and flow display control;
6. Control system: color touch screen, PLC, automatic and manual control convertible. Real-time display detailed parameters, automatic control the entire production process, automatic storage process parameters. The main electric elements adopt Schneider, Siemens and other famous brands;
7. Security system: water, electricity, gas abnormal sound and light alarm device, and perform the corresponding protection;
8. Heating and baking system: stainless steel tubular heating element, substrate temperature up to 350 degrees, the temperature control using the Japanese conductivity meter, temperature control accuracy of ± 1 ° C;
10. Electron gun and evaporation source: electron gun power source adopts the power frequency voltage rise, digital circuits control, sparking with high-pressure, automatic protection, restoration and steady beam function, remote control. the system can commune with quartz crystal thickness meter and coating process automatic control